Synchrotron radiation source ANKA for microfabrication and analytical services

  • Author: M. Hagelstein, G. Buth, A. Gies, E. Huttel, W. Mexner, M. Pont
  • Source: Scientific Reports - Forschungszentrum Karlsruhe FZKA 6990, 187-188
  • Date: 2004